(Q1135912)

English

1.5 µm lithography process

semiconductor manufacturing processes with a 1.5 µm MOSFET technology node

1.5µm
1.5 µm process
1.5 micron process

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photolithography

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3 µm lithography process

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1 µm lithography process

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described by source

International Technology Roadmap for Semiconductors

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Identifiers

1 reference

Freebase Data Dumps

publication date

28 October 2013

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