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Summary
| Description |
English: At 28 nm pitch and below, pupil fill must be restricted (to trapezoid or rectangular zones) below 20% so that after +/-18 degree rotation (slit center vs. slit edge), dipole illumination is still viable.[1] |
| Date | |
| Source | Own work |
| Author | Guiding light |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:19, 16 February 2023 | | 1,464 × 1,063 (185 KB) | Guiding light | Uploaded own work with UploadWizard |
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